Patent · US Active

Insertable target holder for solid dopant materials

US11404254B2 · kind B2 · utility

6Cited by

17References

12Claims

0Family size

Assignee

Varian Semiconductor Equipment Associates, Inc. · US

Inventors

Shreyansh Patel · Lebanon, US
Graham Wright · Newburyport, US
Daniel Alvarado · Pflugerville, US
Klaus Becker · Wetter, DE
Daniel R. Tieger · Gloucester, US
Stephen E. Krause · Ipswich, US

Key dates

Filing date	Feb 6, 2019
Grant date	Aug 2, 2022
Priority date	—
Expiry date	Mar 28, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0827
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An ion source with an insertable target holder for holding a solid dopant material is disclosed. The insertable target holder includes a pocket or cavity into which the solid dopant material is disposed. When the solid dopant material melts, it remains contained within the pocket, thus not damaging or degrading the arc chamber. Additionally, the target holder can be moved from one or more positions where the pocket is at least partially in the arc chamber to one or more positions where the pocket is entirely outside the arc chamber. In certain embodiments, a sleeve may be used to cover at least a portion of the open top of the pocket.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.