Pin lifting device with sliding guide
US11404304B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 25, 2020 |
| Grant date | Aug 2, 2022 |
| Priority date | — |
| Expiry date | Oct 9, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J9/0096
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Disclosed is a pin lifting device for moving and positioning a substrate in a process atmosphere region. The pin lifting device has a coupling part including a coupling configured to receive a support pin designed to contact and carry the substrate, and a drive unit configured to adjust the coupling linearly along an adjustment axis (A) from a lowered normal position into an extended support position and back. The coupling part has a sliding guide element movable along the adjustment axis (A), where the sliding guide element is coupled to the drive unit and where the sliding guide element has at least one sliding element. The sliding element interacts with a guide surface provided by the coupling part to guide the sliding guide element can be linearly along the adjustment axis (A) and in a sliding manner relative to the guide surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.