Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus
US11408429B2 · kind B2 · utility
0Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2018 |
| Grant date | Aug 9, 2022 |
| Priority date | — |
| Expiry date | Aug 6, 2038 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/644
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.