Environmental waveguide sensor with improved design configuration
US11408764B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 4, 2019 |
| Grant date | Aug 9, 2022 |
| Priority date | — |
| Expiry date | Oct 20, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12138
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A sensor comprises: a thin structure, which is configured to receive a force for deforming a shape of the thin structure and which is arranged above a substrate; and a waveguide for guiding an electro-magnetic wave comprising: a first waveguide part; and a second waveguide part; wherein the second waveguide part has a larger width than the first waveguide part; and wherein the first and the second waveguide parts are spaced apart by a gap which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide, wherein one of the first and the second waveguide part is arranged at least partly on the thin structure and another of the first and the second waveguide part is arranged on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.