Patent · US Active

Terahertz spectrum measurement method and system based on unequal optical path method

US11408823B2 · kind B2 · utility

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Key dates

Filing dateMay 4, 2021
Grant dateAug 9, 2022
Priority date
Expiry dateMay 4, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/10
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Terahertz spectrum measurement method and system based on an unequal optical path method is provided. By using a Femtosecond laser and a Terahertz time-domain spectroscopy system, samples to be measured and having different thicknesses are subjected to scanning by time-domain Terahertz signals to obtain transmission signals of the samples with two different thicknesses. The signal after passing through a sample with the thickness of d1 is a reference signal, and the signal after passing through a sample with the thickness of d2 is a sample signal. When Terahertz waves are normally incident to the samples and having different thicknesses, the signals emitted from the samples have an optical path difference therebetween. Phase-containing frequency spectra are obtained after time-domain signals are subjected to Fourier transform. The parameters, such as a refractive index, an extinction coefficient, and an absorption coefficient, can be calculated through the extracted phase-containing frequency spectrums.

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