Optical component alignment system and method using plural fiducials
US11409058B1 · kind B1 · utility
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4References
20Claims
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Key dates
| Filing date | Feb 16, 2021 |
| Grant date | Aug 9, 2022 |
| Priority date | — |
| Expiry date | Feb 16, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4236
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Systems and methods are provided to align a first optical component carried by a first semiconductor chip with a second optical component carried by a second semiconductor chip. Each of the first semiconductor chip and the second semiconductor chip may include at least one primary semiconductor chip fiducial which assists in the alignment of the first optical component carried by a first semiconductor chip with a second optical component carried by a second semiconductor chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.