Bulk acoustic wave resonator and bulk acoustic wave filter
US11411548B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 11, 2022 |
| Grant date | Aug 9, 2022 |
| Priority date | — |
| Expiry date | Jan 11, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/564
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator and a bulk acoustic wave filter are provided. The bulk acoustic wave resonator includes: a piezoelectric layer; an electrode layer located at both sides of the piezoelectric layer; and an electrode edge frame structure located at an edge of the electrode layer and located at one side of the electrode layer away from the piezoelectric layer. The electrode edge frame structure includes a laminated structure, the laminated structure includes an edge convex layer and a passivation layer laminated in a longitudinal direction, and the passivation layer is located at one side of the edge convex layer away from the piezoelectric layer; in a transverse direction, the laminated structure includes a cantilever member and a convex structure connected with each other; a cantilever gap is arranged between the cantilever member and at least one of the piezoelectric layer and the electrode layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.