Atomic beam generator, bonding apparatus, surface modification method, and bonding method
US11412607B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 16, 2020 |
| Grant date | Aug 9, 2022 |
| Priority date | — |
| Expiry date | Feb 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/3452
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.