Patent · US Active

Method of separating a film from a main body of a crystalline object

US11414782B2 · kind B2 · utility

0Cited by
5References
20Claims
0Family size

Inventor

Key dates

Filing dateJul 8, 2019
Grant dateAug 16, 2022
Priority date—
Expiry dateJul 8, 2039

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B29/52
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods are provided for separating a crystalline film from its main body. The method uses ion implantation to generate an ion damaged layer underneath the surface of the crystalline object. The ion damage changes the crystal structure of the ion damaged layer, so it will have different optical transmittance and absorption characteristics from the undamaged part of the crystalline object. A laser beam with a wavelength that is higher than the absorption edge of the non-ion damaged material, but within the absorption range of the ion damaged material is irradiated at or past the ion damaged layer, causing further damage to the ion damaged layer. The film can then be separated from the main body of the crystalline object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.