MEMS gas sensor having a media-sensitive material
US11415537B2 · kind B2 · utility
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Assignee
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Key dates
| Filing date | May 16, 2018 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Jul 4, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0214
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS media sensor, in particular, a MEMS gas sensor, including at least two electrodes, which are situated electrically isolated from one another with the aid of a carrier layer, a media-sensitive material for electrically connecting the two electrodes being applied to the carrier layer, a surface area for applying the media-sensitive material on the carrier layer having a topography, which is adapted to a particle size of particles of the media-sensitive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.