Patent · US Active

Liquid masks for microfabrication processes

US11415877B2 · kind B2 · utility

0Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 7, 2017
Grant dateAug 16, 2022
Priority date—
Expiry dateOct 21, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70958
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Disclosed herein are methods of using a fluoro oil mask to prepare a beam pen lithography pen array.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.