Apparatus for fixing objects by means of vacuum

US11417560B2 · kind B2 · utility

Assignee

• Laser Imaging Systems GmbH · DE

Inventors

• Urban Scholz-Goerlach · Jena, DE
• Uwe Klowsky · Jena, DE
• Guenter Flemming · Zöllnitz, DE

Key dates

• Filing date: Mar 30, 2017
• Grant date: Aug 16, 2022
• Expiry date: Dec 4, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68785
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A device for fixing different-sized base area objects with a vacuum including on a table: first, second, and third vacuum chambers. The third chamber extending the first and second chambers to the entire x direction extension, and the second chamber having parallel, line-forming grooves in the x direction and connected to each other by a first connection channel in the y direction and being released/closed serially relative to the first chamber by a line-switching device. The third chamber includes parallel, column-forming grooves extending in the y direction and connected to each other via a second connection channel in the x direction and being released/closed serially relative to the first chamber by a column-switching device. The third chamber being released/closed serially in the y direction by the line-switching device, in a simultaneous, segmented manner according to the number and positions of the line-forming grooves in correspondence with the second chamber.