Semiconductor transistor device and method of manufacturing the same
US11417732B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 2, 2020 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Jul 2, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/117
Abstract
A semiconductor transistor device is described that has a source region, a body region including a vertical channel region, a drain region, a gate region laterally aside the channel region, a body contact region formed by doping, a diffusion barrier layer, and a conductive region formed of a conductive material. The body contact region electrically contacts the body region, the diffusion barrier layer being arranged in between. The doping of the body contact region is of the same conductivity type but of higher concentration than a doping of the body region. The conductive region has a contact area that forms an electrical contact to the body contact region, the contact area of the conductive region being arranged vertically above an upper end of the channel region. A method for manufacturing the semiconductor transistor device is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.