Transversely-excited film bulk acoustic resonator with multi-pitch interdigital transducer
US11418167B2 · kind B2 · utility
68Cited by
77References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 27, 2021 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Aug 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/568
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There are disclosed acoustic resonators and methods of fabricating acoustic resonators. An acoustic resonator includes a piezoelectric plate having front and back surfaces, the back surface facing a substrate. A portion of the piezoelectric plate forms a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes a multi-pitch interdigital transducer (IDT) with interleaved fingers of the IDT on the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.