Patent · US Active

Transport fixing jig

US11420832B2 · kind B2 · utility

0Cited by
4References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 14, 2017
Grant dateAug 23, 2022
Priority date
Expiry dateMay 1, 2039

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB32B2262/106
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Provided is a transport fixing jig that has a high gripping force, hardly contaminates an object to be processed (object to be transported), and is excellent in heat resistance. The transport fixing jig of the present invention includes: a first base material; a carbon nanotube aggregate; and an adhesive layer arranged between the first base material and the carbon nanotube aggregate, wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.