Thermal flow rate meter
US11422016B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2019 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Mar 19, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a thermal flow rate meter capable of individually correcting different pulsation errors generated in an upstream side temperature sensor and a downstream side temperature sensor. A thermal flow rate meter 1 which measures a flow rate of a gas based on a temperature difference between an upstream side temperature sensor 12 and a downstream side temperature sensor 13, which are arranged on the upstream side and the downstream side of a heating element 11. The thermal flow rate meter includes: a detection element 10 that individually outputs an output signal of the upstream side temperature sensor 12 and an output signal of the downstream side temperature sensor 13; and compensator 20 that individually performs response compensation of the output signal of the upstream side temperature sensor 12 and the output signal of the downstream side temperature sensor 13.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.