Substrate analysis method and substrate analyzer
US11422071B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2019 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Nov 6, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/1006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate analysis method using a nozzle for substrate analysis which discharges an analysis liquid from a tip thereof, scans a substrate surface with a discharged analysis liquid, and sucks the analysis liquid. This is done by arranging a liquid catch plate that catches the discharged analysis liquid, thus retaining analysis liquid discharged between the nozzle tip and the liquid catch plate; positioning the substrate so that the end part thereof can be inserted between the nozzle tip and the liquid catch plate; bringing the end part of the substrate into contact with analysis liquid retained between the nozzle tip and liquid catch plate; and moving the nozzle and liquid catch plate concurrently along a periphery of the substrate, while keeping the end part of the substrate in contact with the analysis liquid, to analyze the end part of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.