Method for conditioning a replication tool and related method for manufacturing a multitude of devices
US11422291B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2018 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Oct 15, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0015
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The method for manufacturing a multitude of devices comprises: And it further comprises, after the conditioning: The treatment can comprise dimensionally changing the tool material by the exposure of the tool material to the conditioning material. Before carrying out the replication processes, the conditioning material can be hardened and removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.