Integrated fingerprint and force sensor
US11423686B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2018 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Feb 10, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F3/041
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Described herein is a ruggedized microelectromechanical (“MEMS”) sensor including both fingerprint and force sensing elements and integrated with complementary metal-oxide-semiconductor (“CMOS”) circuitry on the same chip. The sensor employs either piezoresistive or piezoelectric sensing elements for detecting force and also capacitive or ultrasonic sensing elements for detecting fingerprint patterns. Both force and fingerprint sensing elements are electrically connected to integrated circuits on the same chip. The integrated circuits can amplify, digitize, calibrate, store, and/or communicate force values and/or fingerprint patterns through output pads to external circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.