Method for processing a lithium tantalate crystal substrate
US11424730B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 16, 2020 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Nov 16, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8542
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for processing a lithium tantalate crystal substrate includes providing a lithium tantalate crystal substrate, roughening the lithium tantalate crystal substrate, providing a catalytic agent, bringing the lithium tantalate crystal substrate and the catalytic agent into contact with each other after the lithium tantalate crystal substrate is roughened, and subjecting the lithium tantalate crystal substrate to a reduction treatment. The reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate. The catalytic agent is selected from the group consisting of metal powder, metal gas, and metal carbonate powder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.