Substrate conveying robot and substrate conveying method
US11427412B2 · kind B2 · utility
1Cited by
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9Claims
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Key dates
| Filing date | May 9, 2019 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | Oct 23, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A robot control unit for a substrate conveying robot raises a hand from a first lower position below a first target position at which the hand picks up a substrate to a first upper position above the first target position, and displaces at least one of a plurality of joints in one direction, in a first interval from the first lower position to a first intermediate position between the first lower position and the first target position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.