Capacitive sensors having temperature stable output

US11427465B2 · kind B2 · utility

Assignee

• Sciosense B.V. · NL

Inventors

• Olaf Wunnicke · Eindhoven, NL
• Frederik Willem Maurits Vanhelmont · Maaseik, BE
• Willem Frederik Adrianus Besling · Eindhoven, NL
• Remco Henricus Wilhelmus Pijnenburg · Veldhoven, NL
• Casper van der Avoort · Waalre, NL
• Anderson Singulani · Graz, AT
• Martijn Goossens · Veldhoven, NL

Key dates

• Filing date: Apr 25, 2019
• Grant date: Aug 30, 2022
• Expiry date: Sep 30, 2039

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2207/012
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.