Applying a positive feedback voltage to an electromechanical sensor utilizing a voltage-to-voltage converter to facilitate a reduction of charge flow in such sensor representing spring

US11428702B2 · kind B2 · utility

Assignee

• InvenSense, Inc. · US

Inventors

• Joseph Seeger · Menlo Park, US
• Pradeep Shettigar · San Jose, US

Key dates

• Filing date: Jul 2, 2019
• Grant date: Aug 30, 2022
• Expiry date: Dec 28, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03F2203/45546
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Reducing a sensitivity of an electromechanical sensor is presented herein. The electromechanical sensor comprises a sensitivity with respect to a variation of a mechanical-to-electrical gain of a sense element of the electromechanical sensor; and a voltage-to-voltage converter component that minimizes the sensitivity by coupling, via a defined feedback capacitance, a positive feedback voltage to a sense electrode of the sense element—the sense element electrically coupled to an input of the voltage-to-voltage converter component. In one example, the voltage-to-voltage converter component minimizes the sensitivity by maintaining, via the defined feedback capacitance, a constant charge at the sense electrode. In another example, the electromechanical sensor comprises a capacitive sense element comprising a first node comprising the sense electrode. Further, a bias voltage component can apply a bias voltage to a second node of the electromechanical sensor. In yet another example, the electromechanical sensor comprises a piezoelectric sense element.