Conveying device for conveying at least one wafer
US11430683B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2019 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | May 28, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2213/09
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A conveying device includes a transport body configured to carry or hold a wafer, and a stator relative to which the conveying device is designed to move the transport body at least two-dimensionally on a conveying surface. The stator includes several movably arranged actuating magnets, each of which is connected to the stator via an actuating element, and the actuating element is configured to change a position and/or an orientation of the connected actuating magnets relative to the stator. The transport body includes at least two stationary magnets which are connected to the transport body such that the stationary magnets are immovable relative to the transport body, and the stator and the transport body are magnetically coupled by the stationary magnets and the actuating magnets. The device conveys the transport body relative to the stator by controlled positioning and/or orientation of the actuating magnets via the actuating elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.