Bonded tunable VCSEL with bi-directional actuation
US11431151B2 · kind B2 · utility
1Cited by
4References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2019 |
| Grant date | Aug 30, 2022 |
| Priority date | — |
| Expiry date | Dec 7, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18369
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.