Hydridosilapyrroles, hydridosilaazapyrroles, method for preparation thereof, and reaction products therefrom
US11434252B2 · kind B2 · utility
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2References
4Claims
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Key dates
| Filing date | Sep 16, 2019 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Apr 9, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02219
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Hydridosilapyrroles and hydridosilaazapyrrole are a new class of heterocyclic compounds having a silicon bound to carbon and nitrogen atoms within the ring system and one or two hydrogen atoms on the silicon atom. The compounds have formula (I): in which R is a substituted or unsubstituted organic group and R′ is an alkyl group. These compounds react with a variety of organic and inorganic hydroxyl groups by a ring-opening reaction and may be used to produce silicon nitride or silicon carbonitride films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.