Acoustic resonator
US11437561B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Jun 19, 2019 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Apr 4, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator comprises a substrate, a resonant portion disposed on the substrate and in which a first electrode, a piezoelectric layer, and a second electrode are stacked, a protective layer disposed on an upper portion of the resonant portion, and a hydrophobic layer formed on the protective layer, and the protective layer comprises a first protective layer stacked on the second electrode and a second protective layer stacked on the first protective layer, wherein a density of the second protective layer is higher than a density of the first protective layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.