Surface acoustic wave device on composite substrate
US11437973B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 20, 2019 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Mar 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02566
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A surface acoustic wave device using a longitudinally polarized guided wave comprises a composite substrate comprising a piezoelectric layer formed over a base substrate, wherein the crystalline orientation of the piezoelectric layer with respect to the base substrate is such that, the phase velocity of the longitudinally polarized wave is below the critical phase velocity of the base substrate at which wave guiding within the piezoelectric layer vanishes. A method of fabrication of such surface acoustic wave device is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.