Robust MEMS microphone
US11438706B2 · kind B2 · utility
1Cited by
1References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2021 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Jan 7, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.