Patent · US Active

Hydrogen sensor on medium or low temperature solid micro heating platform

US11440793B2 · kind B2 · utility

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0References

11Claims

0Family size

Assignee

Shanghai Jiao Tong University · CN

Inventors

Guifu Ding · Shanghai, CN
Qi Liu · Nanjing, CN
Yan Wang · Parsippany, US
Yunna Sun · Shanghai, CN

Key dates

Filing date	Dec 24, 2019
Grant date	Sep 13, 2022
Priority date	—
Expiry date	Feb 24, 2041

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0214
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Described herein is a hydrogen sensor on medium or low temperature solid micro heating platform, comprising: a substrate; a thermal-insulating layer disposed above the substrate; a heating structure disposed above the thermal-insulating layer, and thermally and electrically isolated from the substrate by the thermal-insulating layer; a thermal-conducting layer covering the heating structure; and a sensitive layer disposed on the thermal-conducting layer. The sensitive layer can be heated to a set temperature by the heating structure to improve sensitivity and reduce the response time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.