Method of optimising the performance of a MEMS rate gyroscope
US11441902B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2018 |
| Grant date | Sep 13, 2022 |
| Priority date | — |
| Expiry date | Jun 25, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of tuning a vibratory gyroscope, the method comprising the steps of: a) applying an AC drive signal to the drive electrode, the drive signal comprising a plurality of frequencies; b) sensing the response of the resonator to the drive signal at the first and second sense electrodes; c) determining a frequency of maximum response for the first mode of vibration, and determining a frequency of maximum response for the second mode of vibration; d) deriving a comparison result from a comparison of the frequency of maximum response for the first mode of vibration with the frequency of maximum response for the second mode of vibration; and e) applying a biasing voltage to one or more of the tuning electrodes dependent on the comparison result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.