Integrated photonics optical gyroscopes with improved sensitivity utilizing high density silicon nitride waveguides
US11442226B2 · kind B2 · utility
0Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2021 |
| Grant date | Sep 13, 2022 |
| Priority date | — |
| Expiry date | Jun 30, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12138
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Aspects of the present disclosure are directed to structural modifications introduced in a waveguide structure in order to more tightly pack adjacent waveguide turns in an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit. Increasing number of turns of the gyroscope coil increases total waveguide length as well as enclosed area of the gyroscope loop, which translates to increased sensitivity to rotational measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.