Patent · US Active

Coating of 3-dimensional substrates

US11447867B2 · kind B2 · utility

1Cited by

8References

13Claims

0Family size

Assignee

Picosun Oy · FI

Inventors

Marko PUDAS · Sundsberg, FI
Riina RITASALO · Espoo, FI

Key dates

Filing date	Mar 27, 2020
Grant date	Sep 20, 2022
Priority date	—
Expiry date	Mar 24, 2041

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/545
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A substrate processing apparatus, including a reaction chamber, at least one coating material inlet to the reaction chamber, a movable substrate support to support 3D substrates to be coated, and an actuator configured to move the substrate support to change the orientation of said 3D substrates during substrate processing. A method for coating 3D substrates, the method including providing 3D substrates within a reaction chamber on a substrate support, feeding at least one coating material into the reaction chamber, and changing the orientation of said 3D substrates during substrate processing by actuating a movement of the substrate support.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.