Prism-coupling systems and methods with improved intensity transition position detection and tilt compensation
US11448595B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2020 |
| Grant date | Sep 20, 2022 |
| Priority date | — |
| Expiry date | Jan 14, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The prism-coupling systems and methods include using a prism-coupling system to collect a 2D digital mode spectrum of an IOX article. The mode line and critical angle positions and orientations are found by performing a weighted fit to mode line and critical angle images and are used to define a compensated mode spectrum. If mode line tilt is found, it is removed from the 2D digital mode spectrum to define the compensated mode spectrum. The compensated mode spectrum is then processed using techniques known in the art to provide a more accurate estimate of stress-related characteristics of the IOX sample versus using the uncompensated mode spectrum. Derivative-based methods of accurately establishing positions of intensity transitions in a mode spectrum of an IOX sample using a derivative spectrum and curve fitting are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.