Optical sensor arrangement and method for manufacturing an optical sensor arrangement

US11448730B2 · kind B2 · utility

Assignee

• AMS AG · AT

Inventors

• Harald Etschmaier · Graz, AT
• Rainer Minixhofer · Kufstein, AT
• Georg Roehrer · Lebring, AT

Key dates

• Filing date: Jun 2, 2017
• Grant date: Sep 20, 2022
• Expiry date: Jan 15, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical sensor arrangement for time-of-flight comprises a first and a second cavity separated by an optical barrier and covered by a cover arrangement. An optical emitter is arranged in the first cavity, a measurement and a reference photodetector are arranged in the second cavity. The cover arrangement comprises a plate and layers of material arranged on an inner main surface thereof. The layers comprise an opaque coating with a first and second aperture above the first cavity, and with a third and fourth aperture above the second cavity. The measurement photodetector is configured to detect light entering the second cavity through the fourth aperture. The second and the third aperture establish a reference path for light from the emitter to the reference photodetector.