Patent · US Active

BBP assisted defect detection flow for SEM images

US11450012B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Santosh Bhattacharyya · San Jose, US
Ge Cong · Pleasanton, US
Sanbong Park · Dublin, US
Boshi Huang · San Jose, US

Key dates

Filing date	Apr 17, 2020
Grant date	Sep 20, 2022
Priority date	—
Expiry date	Mar 18, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/221
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.