Light source measurement apparatus
US11456572B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2019 |
| Grant date | Sep 27, 2022 |
| Priority date | — |
| Expiry date | Dec 16, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B19/0057
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light source measurement apparatus includes an objective lens that collects light emitted from a light source having a plurality of light emission points, a first reflection attenuation filter, a second reflection attenuation filter, a condensing lens, a space filter, and a movable stage, in which the first reflection attenuation filter and the second reflection attenuation filter are disposed such that polarization directions are orthogonal to each other, in which the space filter has an opening through which light emitted from a measurement target light emission point among the plurality of light emission points is transmitted, and in which the opening has a shape in which a dimension of the measurement target light emission point in a fast direction is larger than a dimension of the measurement target light emission point in a slow direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.