Patent · US Active

MMS, MMS array, MEMS actuator and method for providing an MMS

US11459229B2 · kind B2 · utility

1Cited by

1References

25Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Peter Duerr · Tokyo, JP
Detlef Kunze · Dresden, DE
Andreas Gehner · Duisburg, DE
Martin Friedrichs · Dresden, DE

Key dates

Filing date	Jul 26, 2019
Grant date	Oct 4, 2022
Priority date	—
Expiry date	Feb 23, 2041

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/058
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

An MMS includes a substrate, an element movable with respect to the substrate and a frame structure. A first pair of springs is arranged between the substrate and the frame structure along a first spring direction. A second pair of springs is arranged between the movable element and the frame structure along a second spring direction. The frame structure is configured to generate tensile stress in the second pair of springs at tensile stress acting in the first pair of springs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.