Articles consisting of metal, hard metal, cermet or ceramic and coated with a hard material, and method for producing such articles

US11459660B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Ingolf Endler · Coswig, DE
• Mandy Hoehn · Dresden, DE

Key dates

• Filing date: Feb 2, 2018
• Grant date: Oct 4, 2022
• Expiry date: Feb 2, 2038

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C28/048
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Articles containing metal, hard metal, cermet or ceramic and coated with a hard material, and a method for producing same. The hard material layers can be used as anti-wear layers for cutting tools, as protective layers for turbine blades, or as diffusion barriers in microelectronics. The hard material layers exhibit a high hardness, high oxidation resistance, and excellent wear resistance. The articles are coated with a single- or multi-layer layer system by a thermal CVD method without plasma excitation, where the single- or multi-layer layer system includes at least one nanocomposite layer with a first nanocrystalline phase of cubic titanium oxycarbonitride and a second, amorphous phase of silicon oxycarbonitride or silicon oxycarbide.