Surface quality sensing using self-mixing interferometry
US11460293B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2020 |
| Grant date | Oct 4, 2022 |
| Priority date | — |
| Expiry date | Dec 16, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0221
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic device is described. The electronic device includes a housing, a set of one or more SMI sensors attached to the housing, and a processor. The set of one or more SMI sensors includes a set of one or more electromagnetic radiation emitters having a set of one or more resonant cavities and configured to emit a set of one or more beams of electromagnetic radiation. The set of one or more SMI sensors also includes a set of one or more detectors configured to generate indications of self-mixing within the set of one or more resonant cavities. The processor is configured to characterize, using the indications of self-mixing, an optical field speckle of a target. The processor is also configured to characterize, using the characterization of the optical field speckle, a surface quality of the target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.