Tomographic method of determining a 3D map of a charge collection efficiency and an apparatus for performing the method
US11461939B2 · kind B2 · utility
0Cited by
1References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 23, 2021 |
| Grant date | Oct 4, 2022 |
| Priority date | — |
| Expiry date | Nov 23, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tomographic method of determining a 3D map of a charge collection efficiency in a charge carrier-separating sample. The method includes positioning the sample in a beam path, scanning the sample to measure the beam induced current and/or voltage for a plurality of locations, assigning a coordinate location for each of the plurality of locations, and applying a tomographic image reconstruction algorithm to generate a 3D map of the charge collection efficiency based on the assigned coordinate locations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.