Patent · US Active

Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (PMUT)

US11462677B2 · kind B2 · utility

1Cited by

13References

24Claims

0Family size

Assignee

The Regents of the University of California · US

Inventors

Bernhard Boser · Berkeley, US
David Horsley · Albany, US
Richard Przybyla · Emeryville, US
Ofer Rozen · Davis, US
Stefon Shelton · Oakland, US

Key dates

Filing date	Nov 26, 2019
Grant date	Oct 4, 2022
Priority date	—
Expiry date	Mar 30, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/853
WIPO fieldOther consumer goods
WIPO sectorOther fields

Abstract

A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.