Power monitoring approach for VCSELs and VCSEL arrays
US11462884B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 16, 2020 |
| Grant date | Oct 4, 2022 |
| Priority date | — |
| Expiry date | Mar 16, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure relates to an approach for monitoring the output power of a VCSEL or VCSEL array in a relatively compact, low profile package. A VCSEL device or VCSEL package of the present disclosure may generally be configured with a photodiode for monitoring output power of one or more VCSELs. In some embodiments, one or more VCSEL devices may be arranged over or on a photodetector, such that the photodetector is configured to detect light emitted through a bottom of the VCSEL. In such embodiments, the VCSEL device may have a patterned bottom metal layer and/or an etched substrate to allow light to pass below or behind the VCSEL to the photodiode. In other embodiments, a photodetector may be arranged on a submount adjacent one or more VCSELs, and may be configured to detect light reflected via a diffuser in order to monitor output power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.