PMUT ultrasound transducer with damping layer
US11465177B2 · kind B2 · utility
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4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2019 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Dec 1, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/55
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A PMUT ultrasound transducer includes a number of PMUT transmitting elements in a membrane layer. Behind each PMUT transmitting element is a cavity in the membrane layer. The cavities are partially or completely filled with a damping material to reduce ringing of the PMUT transmitting elements. Suitable damping materials include polymers, e.g., soft epoxies, benzocyclobutene or polyimide that are dispersed into the cavities or a phase changing material such as Parylene that precipitates out of a gas phase as a polymer when cured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.