Processing of solid micron sized particles for rapid deposition on substrate surfaces with uniform particle distribution
US11465179B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2019 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Jun 26, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1014
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This application relates generally to a method and apparatus to deposit particles onto one or more coupons, and harvest particles from one or more coupons, which may beneficially provide a more uniform or localized distribution of particles over a specified area on each coupon. The application relates to a method and apparatus for depositing particles onto one or more coupons using a sieve. The application also relates to a method and apparatus for depositing particles onto one or more coupons using a dust storm. The particle loadings achieved on each coupon or across an individual coupon may be substantially uniform. The application further relates to a laser-based method and apparatus for transferring particles deposited at localized points on a source coupon to a different substrate for further use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.