Ejection device, imprint apparatus, and detection method
US11465350B2 · kind B2 · utility
0Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2020 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Sep 24, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14354
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ejection device includes: an ejection unit provided with an ejection port configured to eject an ejection material; a piezoelectric element configured to cause the ejection material to be ejected from the ejection unit; a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material; a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber; and a detection unit configured to detect a wetness of an ejection port side surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.