Manufacturing method for structure and manufacturing method for liquid ejection head
US11465418B2 · kind B2 · utility
0Cited by
4References
13Claims
0Family size
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Key dates
| Filing date | Mar 17, 2021 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Mar 17, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70058
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A manufacturing method for a structure includes preparing a dry film supported on one surface of a support; bonding the dry film to a substrate so that the dry film and the substrate are in contact with each other; performing first exposure of the dry film bonded to the substrate via the support; removing the support after the first exposure; performing second exposure of the dry film after the support is removed via a photomask; and developing the dry film after the first exposure and the second exposure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.