Optical element having metallic seed layer and aluminum layer, and method for producing same

US11466356B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Friedrich-Schiller-Universitat Jena · DE

Inventors

• Sven Stempfhuber · Jena, DE
• Dieter Gabler · Plaisir, FR
• Paul S. Schmitt · Corning, US
• Peter Munzert · Jena, DE
• Stefan Schwinde · Jena, DE

Key dates

• Filing date: Aug 14, 2020
• Grant date: Oct 11, 2022
• Expiry date: Aug 14, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/0891
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for producing an aluminum layer is provided. The method includes depositing a metallic seed layer on a substrate, the seed layer having a thickness of not more than 5 nm, and also includes applying the aluminum layer to the seed layer, wherein the aluminum layer has a thickness of more than 30 nm. Further, an optical element, which can be a mirror layer, is provided including the metallic seed layer and the aluminum layer.