Method for recalibrating a micromechanical sensor, and recalibrateable sensor

US11467012B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Andrea Visconti · Munich, DE
• Matthias Meier · Rübhausen, DE
• Ruslan Khalilyulin · Munich, DE
• Thomas Zebrowski · Reutlingen, DE
• Wolfram Geiger · Gomaringen, DE

Key dates

• Filing date: Mar 7, 2019
• Grant date: Oct 11, 2022
• Expiry date: Nov 29, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/0035
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Recalibrating a micromechanical sensor. The sensor is assigned a signal processing device for correcting the sensor signal on the basis of at least one previously determined initial trim value that is selected such that, given a defined sensor excitation, a production-related deviation of the sensor signal from a target sensor signal is compensated. The method for recalibrating the sensor includes: applying a defined electrical test excitation signal to the sensor structure, acquiring the corresponding sensor response signal, ascertaining a trim correction value for the at least one initial trim value on the basis of a previously determined relation between the sensor response signal and the trim correction value, and determining at least one current trim value for correcting the sensor signal, the determination of the at least one current trim value taking place on the basis of the at least one initial trim value and the ascertained trim correction value.