Fluid sensor

US11467115B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Ignaz Eisele · Icking, DE
• Karl Neumeier · Taufkirchen, DE
• Martin HEIGL · Weiden, DE
• Daniel Reiser · Munich, DE

Key dates

• Filing date: Mar 26, 2020
• Grant date: Oct 11, 2022
• Expiry date: Mar 18, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D30/60
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

According to a further embodiment, a fluid sensor includes a fluid sensor element with a substrate including a recess for receiving a fluid to be examined, wherein the substrate surrounding the recess is formed, at least in parts, as a substrate electrode, an isolation layer arrangement between a floating gate electrode of a transistor and the substrate electrode and a sensor layer in the recess and adjacent to the floating gate electrode, an additional electrode at an opening area of the recess, wherein the additional electrode is arranged electrically isolated from the sensor layer, the substrate electrode and the floating gate electrode and is connected or connectable to a control potential and a processor configured to provide the control potential at the additional electrode such that an electric field between the additional electrode and the sensor layer is at least reduced or compensated during operation of the fluid sensor.